Replacement Parts

 

  • SCM manufactures and repairs complete Ion Implantor Sources compatible with Varian Extrion and Eaton Nova. We also rebuild Emitter Assemblies and Copper Hearths.
  • In addition, we manufacture multi-pocket and single pocket gun replacement parts compatible with Tesmescal (Edwards), Telemark, and CHA.
  • The ash content of our Graphite parts is less than five parts per million (<5ppm).
  • Many replacement parts are in stock for immediate shipment.
  • Refer to the links on the left for your E-Beam gun and Implantor Source needs.
  • Additional parts and services available upon request.

391 Spook Rock Industrial Park Suffern, NY 10901   Tel: 1-845-368-0240   Email: sales@scm-inc.com